Title Thin-film Silicon Solar Cell Technology
Author: Shah, \{AV\}; Schade, H; Vanecek, M & Meier, J
Progress in \ldots, 2004
2004
http://159.226.64.60/fckeditor/UserFiles/File/tyndc/reference/19938777866047.pdf$\backslash$npapers2://publication/uuid/759B7C7C-296B-4CE2-A937-775C2C98E4BA$\backslash$npapers2://publication/doi/10.1002/pip.533)
More details: This paper describes the use, within p?��i?��n- and n?��i?��p-type cells, of hydro- genated amorphous silicon (a-Si:H) and hydrogenated microcrystalline silicon ( c-Si:H) thin films (layers), both deposited at low temperatures (200 C) by plasma-assisted chemical vapour deposition (PECVD),
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